Double Stage Vacuum System for Poly-Silicon Production

 
DESCRIPTION
Roots Rotary Piston Pump System is made up with the Roots Vacuum Pump and Rotary Piston Vacuum Pump in series connection. Rotary Piston Vacuum Pump is used as the pre-vacuum pump and the backing vacuum pump of the Roots Vacuum Pump, while the Roots Vacuum Pump is the main vacuum pump. The selection of displacement ratio, between the Roots Vacuum Pump and the Rotary Piston Vacuum Pump, is mainly referred to the vacuum value of the vacuum system under long term running; when working in low vacuum, it is advised to select small displacement ratio(2:1 to 4:1); If working in medium or high vacuum, the bigger displacement ratio(4:1to10:1)should be preferred.
 
ADVANTAGE
1.High vacuum, high exhausting efficiency in medium or high vacuum, wide working range, obvious energy-saving results.
2. Integrated rack, compact structure, small required space.
3. High automation, simple operation, easy maintenance, safe, reliable and durable running.
4. To customize a special pump system as per the specific needs of the end user.
 
PARAMETER

Model	Middle Pump  50Hz	Backing  Pump	Displacement (L/s)	Ulimate Partial  Pressure(Pa)	Ulimate Total  Pressure(Pa)	Motor Power (kW)	Suction (mm)	Discharge (mm)
JZH75-3	ZJ-75	H-25DVA	75	0.05	0.8	4.4,3.7	100	40
JZH110-4	ZJ-110	H-25DVA	110	0.05	0.8	4.4,3.7	100	40
JZH150-6	ZJ-150	H-25DVA	150	0.05	0.8	5.2,4.5	100	50
JZH220-4	ZJ-220	H-50DV	220	0.05	0.8	8,6	100	50
JZH220-3	ZJ-220	H-60DVA	220	0.05	0.8	8,7	100	50
JZH300-4	ZJ-300	H-70DV	300	0.05	0.8	9.5	150	63
JZH300-3	ZJ-300	H-100DV	300	0.05	0.8	11.5	150	63
JZH600-6	ZJ-600	H-100DV	600	0.05	0.8	15,13	200	63
JZH600-5	ZJ-600	H-120DV	600	0.05	0.8	15,13	200	63
JZH600-4	ZJ-600	H-150DV	600	0.05	0.8	18.5,16.5	200	80
JZH600-3.5	ZJ-600	H-160DV	600	0.05	0.8	18.5,16.5	200	80
JZH600-3	ZJ-600	H-220DV	600	0.05	0.8	22.5,20.5	200	100
JZH1200-8	ZJ-1200	H-150DV	1200	0.05	0.8	22	250	80
JZH1200-7.5	ZJ-1200	H-160DV	1200	0.05	0.8	22	250	80
JZH1200-5	ZJ-1200	H-220DV	1200	0.05	0.8	26	250	100
JZH1200-4	ZJ-1200	H-300DV	1200	0.05	0.8	33	250	100
JZH1800-8	ZJ-1800	H-220DV	1800	0.05	0.8	30	250	100
JZH1800-6	ZJ-1800	H-300DV	1800	0.05	0.8	37	250	100
JZH1800-3	ZJ-1800	H-600DV	1800	0.05	0.8	60	250	150
JZH2500-11	ZJ-2500	H-220DV	2500	0.05	0.8	37	300	100
JZH2500-8	ZJ-2500	H-300DV	2500	0.05	0.8	44	300	100
JZH2500-4	ZJ-2500	H-600DV	2500	0.05	0.8	67	300	150
JZH5000-8	ZJ-5000	H-600DV	5000	0.05	0.8	82	400	150

Main Specifications for One Roots Pump with Single Stage Rotary Piston Punmp Vacuum System
 
Main Specifications for One Roots Pump with Double Stages Rotary Piston Pump Vacuum System

Model	Main Pump  50Hz	Backing  Pump	Displacement (L/s)	Ulimate Partial  Pressure(Pa)	Ulimate Total  Pressure(Pa)	Motor Power (kW)	Suction (mm)	Discharge (mm)
ZJ2H75-5	ZJ-75	2H-15DVA	75	0.02	0.5	4.4,3.7	100	40
ZJ2H110-7	ZJ-110	2H-15DVA	110	0.02	0.5	4.4,3.7	100	40
ZJ2H150-5	ZJ-150	2H-30DV	150	0.02	0.5	7,6	100	50
ZJ2H220-7	ZJ-220	2H-30DV	220	0.02	0.5	8,6	100	50
ZJ2H220-5	ZJ-220	2H-45DVA	220	0.02	0.5	8,7	100	50
ZJ2H220-4	ZJ-220	2H-50DV	220	0.02	0.5	9.5,8.5	100	63
ZJ2H300-6	ZJ-300	2H-50DV	300	0.02	0.5	9.5	150	63
ZJ2H300-4	ZJ-300	2H-70DV	300	0.02	0.5	11.5	150	63
ZJ2H600-8.5	ZJ-600	2H-70DV	600	0.02	0.5	15	200	63
ZJ2H600-7.5	ZJ-600	2H-80DV	600	0.02	0.5	15	200	63
ZJ2H600-6	ZJ-600	2H-120DV	600	0.02	0.5	18.5,16.5	200	80
ZJ2H600-5	ZJ-600	2H-120DV	600	0.02	0.5	18.5,16.5	200	80
ZJ2H1200-8	ZJ-1200	2H-150DV	1200	0.02	0.5	26	250	100
ZJ2H1200-5	ZJ-1200	2H-220DV	1200	0.02	0.5	33	250	100
ZJ2H1800-8	ZJ-1800	2H-220DV	1800	0.02	0.5	37	250	100
ZJ2H1800-4	ZJ-1800	2H-450DV	1800	0.02	0.5	60	250	150
ZJ2H2500-11	ZJ-2500	2H-220DV	2500	0.02	0.5	44,40.5	300	100
ZJ2H2500-5.5	ZJ-2500	2H-450DV	2500	0.02	0.5	67,63.5	300	150
ZJ2H5000-11	ZJ-5000	2H-450DV	5000	0.02	0.5	82	400	150

 
Main Specifications for Two Roots Pumps with Single Stage Rotary Piston Pump Vacuum System

Model	Main Pump  50Hz	Middle Pump  50Hz	Backing  Pump	Displacement (L/s)	Ulimate Partial  Pressure(Pa)	Ulimate Total  Pressure(Pa)	Motor Power (kW)	Suction (mm)	Discharge (mm)
J2ZH220-33	ZJ-220	ZJ-75	H-25DVA	220	0.02	0.5	7.4	100	40
J2ZH300-43	ZJ-300	ZJ-75	H-25DVA	300	0.02	0.5	8.4	150	40
J2ZH600-43	ZJ-600	ZJ-150	H-50DV	600	0.02	0.5	14.5	200	50
J2ZH1200-53.5	ZJ-1200	ZJ-220	H-60DVA	1200	0.02	0.5	18	250	50
J2ZH1200-53	ZJ-1200	ZJ-220	H-70DV	1200	0.02	0.5	19.5	250	63
J2ZH1200-43	ZJ-1200	ZJ-300	H-100DV	1200	0.02	0.5	22.5	250	63
J2ZH1200-42.5	ZJ-1200	ZJ-300	H-120DV	1200	0.02	0.5	22.5	250	63
J2ZH1800-62.5	ZJ-1800	ZJ-300	H-150DV	1800	0.02	0.5	26.5	250	63
J2ZH1800-34	ZJ-1800	ZJ-600	H-160DV	1800	0.02	0.5	33.5	250	80
J2ZH1800-33.5	ZJ-1800	ZJ-600	H-150DV	1800	0.02	0.5	33.5	250	80
J2ZH2500-44	ZJ-2500	ZJ-600	H-160DV	2500	0.02	0.5	40.5	300	80
J2ZH2500-43.5	ZJ-2500	ZJ-600	2H-220DV	2500	0.02	0.5	40.5	300	80
J2ZH2500-43	ZJ-2500	ZJ-600	H-220DV	2500	0.02	0.5	44.5	300	100
J2ZH5000-44	ZJ-5000	ZJ-1200	H-300DV	5000	0.02	0.5	70	400	100
J2ZH5000-33	ZJ-5000	ZJ-1800	H-600DV	5000	0.02	0.5	97	400	150

 
Main Specifications for Two Roots Pumps with Double Stages Rotary Piston Pump Vacuum System

Model	Main Pump  50Hz	Middle Pump  50Hz	Backing  Pump	Displacement (L/s)	Ulimate Partial  Pressure(Pa)	Ulimate Total  Pressure(Pa)	Motor Power (kW)	Suction (mm)	Discharge (mm)
J2Z2H220-35	ZJ-220	ZJ-75	2H-15DVA	220	0.01	0.3	8.4	100	40
J2Z2H300-42.5	ZJ-300	ZJ-75	2H-30DV	300	0.01	0.3	10.2	150	20
J2Z2H600-43.5	ZJ-600	ZJ-150	2H-45DVA	600	0.01	0.3	10.2	200	20
J2Z2H600-43	ZJ-600	ZJ-150	2H-50DV	600	0.01	0.3	14.5	200	20
J2Z2H1200-53	ZJ-1200	ZJ-220	2H-70DV	1200	0.01	0.3	14.5	250	63
J2Z2H1200-44	ZJ-1200	ZJ-300	2H-80DV	1200	0.01	0.3	22.5	250	63
J2Z2H1200-43	ZJ-1200	ZJ-300	2H-100DV	1200	0.01	0.3	22.5	250	80
J2Z2H1200-42.5	ZJ-1200	ZJ-300	2H-120DV	1200	0.01	0.3	26	250	80
J2Z2H1800-34	ZJ-1800	ZJ-600	2H-150DV	1800	0.01	0.3	37.5	250	100
J2Z2H1800-33.5	ZJ-1800	ZJ-600	2H-160DV	1800	0.01	0.3	37.5	250	100
J2Z2H1800-33	ZJ-1800	ZJ-600	2H-220DV	1800	0.01	0.3	44.5	250	100
J2Z2H1800-43.5	ZJ-2500	ZJ-600	2H-160DV	2500	0.01	0.3	44.5	300	100
J2Z2H2500-43	ZJ-2500	ZJ-600	2H-220DV	2500	0.01	0.3	51.5	300	100
J2Z2H5000-43	ZJ-5000	ZJ-1200	2H-450DV	5000	0.01	0.3	93	400	150

Note:1,If roots vacuum pump is operated at 60Hz,the displacement should be increased to1.2times.
          2,For the ZJP roots vacuum pumps with bypass valve,the unit model must be changed to J2ZPH,other parameters are unchanged.
 
APPLICATION
Widely used in vacuum coating, vacuum metallurgy, vacuum heat treatment, vacuum drying, vacuum impregnation, vacuum strainer, poly-silicon production, aerospace simulation and so on.
 
Sea Port: Ningbo/Shanghai, China
Standard: CE Mark, Spare Parts Of High Level
Delivery: Normally according to our factory production schedule, but we can follow your first order time 
Warranty: If pump appear quality problems, free replacements of spare parts will be offered within one year
 
WE CAN PROVIDE YOU
1. On-time Delivery, with More Choice 
2. Perfect Technical Support
3. Customized Vacuum Solutions and Service 
4. Samples Available
5.  Long Quality Guarantee 
6. Fast Response to Customers' Feedback in 12 hours 
 
DEVELOPMENT VACUUM EQUIPMENT CO., LTD 
ADD:DONGGANG INDZONE, TAIZHOU, ZHEJIANG, CHINA PC: 317106
TEL:+86-576-83598308 FAX:+86-576-83598309