Product Specifications
Product Description
Flow Range (equivalent N2): 0 ~ 5, 10, 20, 30, 50, 100, 200, 300, 500 SCCM;
0 ~ 1, 2, 3, 5, 10, 20, 30 SLM
Accuracy: 1% FS;
Repeatability: 0.2% FS
Response Time: Electrical characteristics <10sec gas properties <1 ~ 4sec
Linearity: (0.5 ~ 1)% FS
Pressure Coefficient: 0.05 ~ 0.3MPa
Pressure: 3, 10 MPa;
Temperature Range: 5 ~ 45
Set Point Signal and Flow Output Signal: From 0 to 5 VDC
Power Supply: +15V 500mA, -15V 500mA (input impedance greater than 100K,
Output current is not greater than 3mA)
Electrical Connector: D14pin
Size: 130 * 28 * 121mm
Weight: About 1.0kg
Interface Size:
Swagelok: Φ3. Φ6. Φ10.1 / 4 ". 3 / 8 "...
VCR connector: 1 / 4". 3 / 8 ". 1 / 8 "...
DSN series gas mass flow controller, said that the Mass Flow Controller (abbreviated as MFC), not only has the function of the mass flowmeter, more importantly, it can automatic control of gas flow, that is, the user may need to set the flow, MFC Will automatically flow at a constant value, even if there is pressure on the system or fluctuations in ambient temperature changes and will not deviate from its set value. In short, mass flow controller is a steady flow device, a manual can be set or a computer connection automation and the steady flow of gas installations.
