Product Name
Vacuum magnetron sputtering coating machine
Product Profile
Vacuum magnetron sputtering coating machine is widely used in household appliances, clocks,lamps, crafts, toys, light reflector, phone keypad outer covering, instrumentation, plastics, glass, ceramics, tiles, decorative film and functional film.Our company's magnetron sputtering coating machine has many advantages such as good controllability and repeatability for film thickness, strong adhesion between substrate and film, special material film coating, mixed film,compound film and TiN imitation gold film making by different materials sputtering on products' surface at the same time,high purity films etc..
Technical Specification
Type | CK-700 | CK-900 | CK-1000 | CK-1250 | CK-1400 | CK-1600 |
Vacuum chamber size | 700×H 900mm | 900×H 1100mm | 1000×H 1200mm | 1250×H 1350mm | 1400×H 1600mm | 1600×H 1800mm |
Power supply | Pulse bias power supply; DC magnetron power supply (can be equipped with different power supply by requested) |
Vacuum chamber structure | Vertical single/double door, rear vacuum acquisition system |
Vacuum chamber material | SUS-304 superior stainless steel |
Ultimate vacuum | 8.0×10-4Pa | 8.0×10-4Pa | 8.0×10-4Pa | 8.0×10-4Pa | 8.0×10-4Pa | 8.0×10-4Pa |
Pumping speed | From 1 atm to 6.7×10-3Pa take 8~15min (room temperature, clean and unload) |
Vacuum system | Diffusion pump + roots pump + rotary vane pump + holding pump (can be adjusted by requested) |
Magnetron target type | Planar magnetron target, cylindrical magnetron target |
Pulse bias power supply | 25KW | 25KW | 30KW | 30KW | 40KW | 40KW |
Shelves rotation system | Planetary revolution and rotation, frequency control, upper and base rotation shelves, number of axes equipped by requested. |
Process gas | Mass flow controller (3-4 ways), manual or automatic processing gas systems |
Cooling system | Water-cooling system. Cooling water tower, industrial cooling water machine or deep water cooling system is needed to purchase separately. ( or supplied by user) |
Control system | Manual or PLC + touch screen |
Alarm and protection | Water pressure alarm, air pressure alarm, over current protection, execution on related protective measures and electrical interlock systems. |
Foot print | W3m× L3.5m | W3m× L3.5m | W3.5m× L5m | W3.5m× L5m | W4.5m× L5.5m | W4.5m× L5.5m |
Other technical data | Water pressure≥0.2MPa, water temperature≤25ºC, air pressure 0.5-0.8MPa |
Remarks | Specific size can be designed by user's requested. Customizable vacuum chamber size range: 500-3000mm, H: 500-3000mm. |
Qingdao UBU Vacuum Equipments Co., Ltd. is a high-tech enterprise which is specialized in engaging in researching, manufacturing and marketing various kinds of vacuum coating equipments, these vacuum equipments provide a powerful technical support and after-sales-services for all kinds of famous enterprises both at home and abroad. At present, our company headquarters is located in an important international port city - Qingdao, with convenient sea transportation and talent pool, which has offices and agents in Shenzhen and abroad (Turkey), exporting area including Asia, North America, Europe and other places.
Our company has had nine main coating equipments which are including Multiple arc plasma vacuum coating equipment, Magnetic sputtering vacuum coating equipment, Multifunctional intermediate frequency vacuum coating equipment, Evaporation vacuum coating equipment, Automatic optical coating equipment, Vacuum roll coating equipment, DLC vacuum coating equipment, UV lacquer curing system and Continuous magnetic sputtering vacuum coating line. In addition, we also provide services like professional PVD coating service according to customer's different requirements, supplying related accessories and old machine's updating, helping customer's to solve various of questions and making all the customers satisfied.
Now our company covers more than 10000 square meters and has over hundred staff, including R&D team, production team, marketing team and after-sale-services team. In 2014, our company successfully listed, becoming one of the leading high-end manufacturing enterprises with strong comprehensive strength.
Our company is founded on the idea of "The user is supreme, Strives for perfection", adhering to the "high quality, high efficiency, low energy consumption" development strategy. No matter the turn-key project or one-to-one professional service policy will provide the omnibearing, multilevel and high field for the general customers high quality service. Our company will continue to make contributions to advancing the world standard of vacuum application equipments, hoping to cooperate with all customers to create new brilliant future.