Categories
Price: | US $ 30000/Piece |
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Trade Terms: | FOB,CFR,CIF |
Min Order: | 1/Piece |
Pay Type: | L/C,T/T,Western Union |
Type | LZ-1000 | LZ-1200 | LZ-1300 | LZ-1600 | LZ-2100 | LZ-2300 | |||||
Vacuum chamber size | 1000×H 1000mm | 1200×H 1300mm | 1300×H 1300mm | 1600×H 1800mm | 2100×H 3600mm | 2300×H 4500mm | |||||
Power supply | Pulse bias power supply, arc power supply (can be equipped with different power supply by requested) | ||||||||||
Vacuum chamber structure | Vertical single/double door, rear vacuum acquisition system | ||||||||||
Vacuum chamber material | SUS-304 superior stainless steel | ||||||||||
Ultimate vacuum | 8.0×10-4Pa | 8.0×10-4Pa | 8.0×10-4Pa | 8.0×10-4Pa | 8.0×10-4Pa | 8.0×10-4Pa | |||||
Pumping speed | From 1 atm to 6.7×10-3Pa take 8~15min (room temperature, clean and unload) | ||||||||||
Vacuum system | Diffusion pump + roots pump + rotary vane pump + holding pump (can be adjusted by requested) | ||||||||||
Number of multi-arc | 4 | 8 | 8 | 16 | 36 | 45 | |||||
Shelves rotation system | Planetary revolution and rotation, frequency control, upper and base rotation shelves, number of axes equipped by requested. | ||||||||||
Process gas | Mass flow controller (3-4 ways), manual or automatic processing gas systems | ||||||||||
Cooling system | Water-cooling system. Cooling water tower, industrial cooling water machine or deep water cooling system is needed to purchase separately. ( or supplied by user) | ||||||||||
Control mode | Manual or PLC + touch screen | ||||||||||
Alarm and protection | Water pressure alarm, air pressure alarm, over current protection, execution on related protective measures and electrical interlock systems. | ||||||||||
Foot print | W3m× L3.5m | W3.5m× L5m | W3.5m× L5m | W4.5m× L5.5m | W4.5m× L11m | W5m× L12m | |||||
Other technical data | Water pressure≥0.2MPa, water temperature≤25ºC, air pressure 0.5-0.8MPa | ||||||||||
Remarks | Specific size can be designed by user's requested. DC magnetron power supply and intermediate frequency power supply can be equipped to meet the different coating process. Customizable vacuum chamber size range: 500-3000mm, H: 500-7000mm. |
Prod Model: | LZ- |
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Markets: | North America,South America,Eastern Europe,Southeast Asia,Africa,Oceania,Mid East,Eastern Asia,Western Europe |
Vacuum Chamber Size: | D700-1600mm, H900-1800mm |
Power Supply: | Pulse Bias Power Supply; DC Magnetron Power Supply |
Vacuum Chamber Structure: | Vertical Single/Double Door |
Vacuum Chamber Material: | SUS-304 Superior Stainless Steel |
Ultimate Vacuum: | 8.0×10-4PA |
Shelves Rotation System: | Planetary Revolution and Rotation |
Process Gas: | Mass Flow Controller (3-4 Ways), Manual or Auto |
Cooling System: | Water-Cooling System, Cooling Water Tower |
Control Mode: | Manual or PLC + Touch Screen |
Alarm And Protection: | Water/Air Pressure Alarm, Over Current Protection |
Coating: | Vacuum Coating |
Type: | Coating Production Line |
Substrate: | Metal/Stainless Steel/Plastic/Ceramic/Glass |