Categories
Price: | US $ 24000-25000set |
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Trade Terms: | FOB |
Min Order: | 1set |
Pay Type: | L/C,T/T,Western Union |
Type | CK-700 | CK-900 | CK-1000 | CK-1250 | CK-1400 | CK-1600 | |||||
Vacuum chamber size | Φ700×H900mm | Φ900×H1100mm | Φ1000×H1200mm | Φ1250×H1350mm | Φ1400×H1600mm | Φ1600×H1800mm | |||||
Power supply | Pulse bias power supply; DC magnetron power supply (can be equipped with different power supply by requested) | ||||||||||
Vacuum chamber structure | Vertical single/double door, rear vacuum acquisition system | ||||||||||
Vacuum chamber material | SUS304 superior stainless steel | ||||||||||
Ultimate vacuum | 8.0×10-4Pa | 8.0×10-4Pa | 8.0×10-4Pa | 8.0×10-4Pa | 8.0×10-4Pa | 8.0×10-4Pa | |||||
Pumping speed | From 1 atm to 6.7×10-3Pa take 8~15min (room temperature, clean and unload) | ||||||||||
Vacuum system | Diffusion pump + roots pump + rotary vane pump + holding pump (can be adjusted by requested) | ||||||||||
Magnetron target type | Planar magnetron target, cylindrical magnetron target | ||||||||||
Pulse bias power supply | 25KW | 25KW | 30KW | 30KW | 40KW | 40KW | |||||
Shelves rotation system | Planetary revolution and rotation, frequency control, upper and base rotation shelves, number of axes equipped by requested. | ||||||||||
Process gas | Mass flow controller (3-4 ways), manual or automatic processing gas systems | ||||||||||
Cooling system | Water-cooling system. Cooling water tower, industrial cooling water machine or deep water cooling system is needed to purchase separately. ( or supplied by user) | ||||||||||
Control system | Manual or PLC + touch screen | ||||||||||
Alarm and protection | Water pressure alarm, air pressure alarm, over current protection, execution on related protective measures and electrical interlock systems. | ||||||||||
Foot print | W3m×L3.5m | W3m×L3.5m | W3.5m×L5m | W3.5m×L5m | W4.5m×L5.5m | W4.5m×L5.5m | |||||
Other technical data | Water pressure≥0.2MPa, water temperature≤25ºC, air pressure 0.5-0.8MPa | ||||||||||
Remarks | Specific size can be designed by user's requested. Customizable vacuum chamber size range: Φ 500-3000mm, H: 500-3000mm. |
Prod Model: | CK series |
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Markets: | North America,South America,Eastern Europe,Southeast Asia,Africa,Oceania,Mid East,Eastern Asia,Western Europe |
Vacuum Chamber Size: | D500-3000mm,H500-4500mm |
Power Supply: | Pulse Bias Power Supply; DC Magnetron Power Supply |
Vacuum Chamber Structure: | Vertical Single/Double Door |
Vacuum Chamber Material: | SUS304 Superior Stainless Steel |
Ultimate Vacuum: | 8.0×10-4PA |
Shelves Rotation System: | Planetary Revolution and Rotation |
Process Gas: | Mass Flow Controller (2-4 Ways), Manual or Auto |
Cooling System: | Water-Cooling System,Cooling Water Tower |
Control Mode: | Manual / Automatic or Semi-Auto PLC + Touch Screen |
Alarm And Protection: | Water/Air Pressure Alarm,Over Current Protection |
Coating: | Vacuum Coating |
Type: | Physical Vapor Deposition |
Substrate: | Metal Parts/Stainless Steel /Plastic/Ceramic/Glass |
Condition: | We Have Both of New and Used |