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Supplier: | Shanghai Vakia Coating Technology Co., Ltd. |
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Price: | Negotiable/Set |
Min Order: | 1/Set |
Quantity:: | |
Trade Terms: | FOB |
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Prod Model: | OEC-1350 |
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Markets: | North America,Eastern Europe,Mid East |
Model Function |
VAKIA-OEC-900 | VAKIA-OEC-1200 | VAKIA-OEC-1350 |
Vacuum Chamber Inner Size |
φ 900*H1050mm | φ 1200*H1250mm | φ 1350*H1450mm |
frock clamp |
Arch single workpiece tray, satisfy customers' demand of uniformity to a greater extent, rotate 5 to 30 r/min, Continuously Variable Transmission |
1 Arch single workpiece tray, satisfy customers' demand of uniformity to a greater extent, rotate 5 to 30 r/min, Continuously Variable Transmission. 2 Arch three workpiece tray, planetary, revolution-autorotation, satisfy customers' demand of productivity, rotate 5 to 30 r/min, Continuously Variable Transmission |
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Vacuum system |
Diffusion pump KT-600(VAKIA), Roots Pump ZJ-300, Mechanical pump2X-70, Holding pump2X-8, Pipeline is made of 304 Stainless Steel |
Diffusion pump KT-800(VAKIA), Roots Pump ZJ-600, Mechanical pump2X-70, Holding pump2X-8, Pipeline is made of 304 Stainless Steel |
Diffusion pump KT-800(VAKIA), Roots Pump ZJ-300, Mechanical pump2X-70, Holding pump2X-15, Pipeline is made of 304 Stainless Steel |
Ultimate Vacuum: superior to 6.0× 10 -4 Pa | |||
Be equipped with anti-turbulence device, safety interlock, Automatic and Manual operation mode optional |
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Heating System | Heating on the thermotube, PID control, highest 350 º C± 1.5º C | ||
Inflation of process gas |
Gas mass control meter or gas filled valve Which can be manually fine tuning |
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Vacuum Ion bombardment |
Direct Current3KV, 0.6KW clavate cathode(used for cleaning Workpiece by itself before coating) and gas ion source select |
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Evaporation source(selected) | 1 Electron gun: 6KW, high pressure4 KV to 10 KV adjustable. Positioning scanning, triangular scanning, circular scanning, spiral scanning, orthogonal scanning, sine wave, focusing capability of beam spot is good, positioning accuracy is high, good reproducibility | ||
2 crucible: six pointsφ 38*20 crucible or four pointsφ 38*20 plus anotherpoint arc crucible which center arc length is 87(used for high consumption and low melting point of evaporation material) or crucibleφ 48*18 | |||
Ion source(selected) |
1.5KV hall ion source: used for cleaning before electroplating or assisted deposition, which helped acquiring the higher refractivity, firmness, good compactness and strong adhesion |
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Coating control system(selected) |
Quartz crystal film thickness control meter: can store up 1 to 99 layer automation coating process, 99 kinds of data, is of high precision |
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Optical film thickness control meter: adopted multi-wave full spectrum destination analysis technology, judge film layer through the curveanalysis of 370 to 870mm transmissivity (or reflectivity) of monitoring chips, can achieve high control precision |
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