Product Specifications
| Prod Model: |
CSE-SC09-MUX |
| Markets: |
North America,South America,Eastern Europe,Southeast Asia,Africa,Oceania,Mid East,Eastern Asia,Western Europe |
| Suitable Size: |
Quartz Tube |
| Operation Mode: |
Auto / Semi-Auto / Manual |
| Product Type: |
Wet Bench or Wet Station |
| Operational Method: |
Continuous |
| Structure: |
Rotary Type Drier |
| Operation Pressure: |
Atmospheric Dryer |
| Movement Way: |
Combined |
| Heating Mode: |
Transmission |
Product Description
Equipment overview:
Wafer drying machine has high cleanliness spin rinsedry function. Mainly used for silicon wafer, reticle, solar cells and other similar materials washing drying.
Structure:
Working cavity structure, the largest processing diameter150mm. S is a double cassette structure
System constitution:
The machine adopts double station (or single) stack, product this type structure, each station can be run independently without mutual interference. Can realize automatic process including rotary flushing, drying, nitrogen resistivity monitoring, anti-static control, cavity drying, fault display alarm, system cleaning.
The principle and characteristic of structure
Cleaning technology
High power brushless motor drive
Cleaning work
Rotating nitrogen sealing technology
Deionized water control
ESD control
Earthquake, seismic isolation technology
Speed, counting control technology
Brake control technology
System control technology
Processing software
Particle control performance
Security and protection
Door position monitoring and interlocking
Production technology
Suzhou CSE Semiconductor Equipment Technology Co., Ltd., is a joint-stock enterprise invested by CAS Suzhou Institute of Nano-tech and Nano-bionics and Beijing HL Co., which was set up in Mar. 2008 and its registered capital is 45 million RMB. The Company mainly supplys wet chemical processing systems applied in semiconductor, solar photovoltaic, LCD industries, such as wafer wet bench, quartz-tube cleaning machine, solar wafer etching and cleaning equipment, LCD Developing&Etching Processor, wafer dryer and etc.
Depending on the high-tech R&D team of CAS Suzhou Institute of Nano-tech and Nano-bionics and HL? S skillful experience in related industries together, the company engage in developing and producing semiconductor equipment in middle and high-end market. Based on high quality and innovative spirit, the company make great effort not only in equipments developing but also in processing research to satisfy and lead the newest technology. The company? S technical team is constituted by some experienced professors of semiconductor, solar photovoltaic and LCD industries, such as Doctor Baoshun Zhang, Doctor Minrui Wang, Doctor Yonghong Zhang and others.
Now We are looking for foreign topping companies of semiconductor, solar photovoltaic and FDP equipment fields to cooperate in OEM or agent, relying on our professional technology and experience with high-tech developing team of CAS Suzhou Institute of Nano-tech, we will be a good partner in increasing both business!
